Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology
نویسندگان
چکیده
منابع مشابه
Nano-opto-electro-mechanical systems.
A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances ...
متن کاملA nano-opto-mechanical pressure sensor via ring resonator.
This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring r...
متن کاملPolymer Guided Wave Integrated Optics: An Enabling Technology for Micro-Opto-Electro-Mechanical Systems
Efficient merging of optical, microelectromechanical (MEM) and microelectronic systems offers significant potential for achieving the crooptoe1ectromechanical (MOEM) system functionality necessary to meet the performance needs of a number of emerging display, sensing, communications, and control applications. Central to realization of this potential will be the development of a set of microopti...
متن کاملNano-Electro-Mechanical (NEM) Relay Devices and Technology for Ultra-Low Energy Digital Integrated Circuits
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. To copy otherwise, to republish, to post on servers or to redistribute to lists, requires prior specific permission....
متن کاملVibration Response of an Elastically Connected Double-Smart Nanobeam-System Based Nano-Electro-Mechanical Sensor
Nonlocal vibration of double-smart nanobeam-systems (DSNBSs) under a moving nanoparticle is investigated in the present study based on Timoshenko beam model. The two smart nanobeams (SNB) are coupled by an enclosing elastic medium which is simulated by Pasternak foundation. The energy method and Hamilton’s principle are used to establish the equations of motion. The detailed param...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Nature Communications
سال: 2017
ISSN: 2041-1723
DOI: 10.1038/s41467-017-02392-5